Alarm Support

Com_Err

Communication Error

Detail

FLT_PT_BP

Back P.T. Fault

Detail

FLT_PT_N2L

N2 Line P.T. Fault

Detail

FLT_PT_N2C

N2 Cyl. P.T. Fault

Detail

FLT_PT_PH3L

PH3 Line P.T. Fault

Detail

FLT_PT_PH3C

PH3 Cyl. P.T. Fault

Detail

HP_PH3L_PRCO

There is pressure on line PH3

Detail

HP_PH3C_PRCO

There is pressure on CYL. PH3

Detail

SBX_PRCO

Safety Box

Detail

HP_PH3L_EC

There is pressure on line PH3

Detail

HP_PH3C_EC

There is pressure on CYL. PH3

Detail

SBX_EC

Safety Box

Detail

F02_BLWT

High N2 Regulator Pressure

Detail

HP_N2C_BLWT

High N2 cylinder pressure

Detail

FLT_BLWT

Blower Test Failed

Detail

F10_BLWT

High Back Pressure

Detail

F06_BLWT

Low Blower Frequency

Detail

F11_BLWT

Low Air Flow

Detail

HP_PH3L_BLWT

There is pressure on line PH3

Detail

HP_PH3C_BLWT

There is pressure on CYL. PH3

Detail

SBX_BLWT

Safety Box

Detail

F10_N2C

High Back Pressure

Detail

F06_N2C

Low Blower Frequency

Detail

F11_N2C

Low Air Flow

Detail

HP_PH3L_N2C

There is pressure on line PH3

Detail

HP_PH3C_N2C

There is pressure on CYL. PH3

Detail

SBX_N2C

Safety Box

Detail

F10_VC

High Back Pressure

Detail

F06_VC

Low Blower Frequency

Detail

F11_VC

Low Air Flow

Detail

F07_VC

Low N2 Cyl. Pressure

Detail

HP_PH3C_VC

There is pressure on CYL. PH3

Detail

SBX_VC

Safety Box

Detail

F10_LLC

High Back Pressure

Detail

F06_LLC

Low Blower Frequency

Detail

F11_LLC

Low Air Flow

Detail

F07_LLC

Low N2 Cyl. Pressure

Detail

HP_PH3C_LLC

There is pressure on CYL. PH3

Detail

SBX_LLC

Safety Box

Detail

F10_SFA

High Back Pressure

Detail

F06_SFA

Low Blower Frequency

Detail

F11_SFA

Low Air Flow

Detail

F07_SFA

Low N2 Cyl. Pressure

Detail

HP_PH3C_SFA

There is pressure on CYL. PH3

Detail

SBX_SFA

Safety Box

Detail

F10_FCO

High Back Pressure

Detail

F06_FCO

Low Blower Frequency

Detail

F11_FCO

Low Air Flow

Detail

F07_FCO

Low N2 Cyl. Pressure

Detail

F10_FUM

High Back Pressure

Detail

F06_FUM

Low Blower Frequency

Detail

F07_FUM

Low N2 Cyl. Pressure

Detail

F05_FUM

Low N2 Flow

Detail

F11_FUM

Low Air Flow

Detail

FLT_BIF_FUM

FLT_BIF_FUM

Detail

LOW_PH3P_F

Low PH3 Pressure

Detail

EMP_PH3CYL

Empty PH3 Cylinder

Detail

LOW_PH3F_F

Low PH3 Flow

Detail

CUTF_PH3

Phosphine flow stopped

Detail

F10_PRG

High Back Pressure

Detail

F06_PRG

Low Blower Frequency

Detail

F07_PPRG

Low N2 Cyl. Pressure

Detail

F05_PRG

Low N2 Flow

Detail

F11_PRG

Low Air Flow

Detail

FLT_BIF_PPRG

Blower Inverter Fault

Detail

PM

Periodical Maintenance

Detail

PM_PH3

Periodical Maintenance PH3

Detail

PM_FUM

Periodical Maintenance Fumigation

Detail

PM_BLW

Periodical Maintenance Blower

Detail

PM_MIXV

Periodical Maintenance Mix Valve

Detail

PM_PRGV

Periodical Maintenance Purge Valve

Detail

PM_SFTYV

Periodical Maintenance Safety Valve

Detail

PM_PH3V

Periodical Maintenance PH3 Valve

Detail

F01

Emergency Stop

Detail

F10_PPRG

High Back Pressure

Detail

F06_PPRG

Low Blower Frequency

Detail

F11_PPRG

Low Air Flow

Detail

F07_PPRG

Low N2 Cyl. Pressure

Detail

F02_PPRG

High N2 Regulator Pressure

Detail

F03_PPRG

Low N2 Regulator Pressure

Detail

F04_PPRG

High N2 Flow

Detail

F05_PPRG

Low N2 Flow

Detail

F05_FCO

Low N2 Flow

Detail

F04_FCO

High N2 Flow

Detail

F03_FCO

Low N2 Regulator Pressure

Detail

F02_FCO

High N2 Regulator Pressure

Detail

PH3V_OPN1

Phosphine Cylinder Valve Open 1

Detail

PH3V_OPN2

Phosphine Cylinder Valve Open 2

Detail

F03_LLC

Low N2 Regulator Pressure

Detail

F12_FUM

Low Air Pressure

Detail

F02_FUM

High N2 Regulator Pressure

Detail

F03_FUM

Low N2 Regulator Pressure

Detail

F03_VCO

Low N2 Regulator Pressure

Detail

F04_FUM

High N2 Flow

Detail

F07_PRG

Low N2 Cyl. Pressure

Detail

FLT_BIF_X

Blower Inverter Fault

Detail

HP_N2C_EC

High N2 cylinder pressure

Detail

HP_N2L_EC

There is pressure on line N2

Detail

HP_PH3L_PRG

There is pressure on line PH3

Detail

PH3L_CLG

The PH3 filter is clogged.

Detail

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